Refractory Metals for Semiconductor & LED Manufacturing
Thin-film deposition and crystal growth create process conditions — high temperatures, ultra-high vacuum, aggressive plasmas — under which standard metals evaporate, contaminate or fail to hold their purity. Refractory metals provide the thermal stability at the purity level semiconductor processes demand.
Which Material for Which Function
Molybdenum
High thermal conductivity and thermal-shock resistance, very good machinability at high purity: heaters, heat shields, carrier plates (susceptors) and sputtering targets.
Tungsten
Highest melting point, extremely low evaporation rate even at process temperature: long-life sputtering targets and crucibles for crystal growth.
Tantalum
Forms a stable, dense oxide layer and acts as a diffusion barrier: targets for barrier layers in Cu interconnects.
Niobium
High achievable purity, superconducting properties: specialty targets for superconducting and optical layers.
Ceramics (Boron Nitride, AlN)
Electrically insulating with high thermal conductivity at the same time: substrates and insulators placed directly in the system's high-temperature zone.
Components in Everyday Use
- MOCVD heaters for GaN/LED manufacturing
- Sputtering targets for PVD coating systems
- Susceptors for wafer processes
- Diffusion barriers in Cu interconnects
- Crucibles for sapphire and SiC crystal growth
- AlN substrates for power electronics
Why Refracore. Purity grade, grain size and target material determine process stability — we know the specification differences between standard and high-purity targets and advise accordingly. Supplied as raw material or as a finished, machined target, with certification as required.
Request Sputtering Target Specification & Purity Grade
Describe your application — we'll get back to you within 1–2 business days with a technical assessment.
